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Chemical supply system and C&C process

Real-time monitoring of the concentration of each chemical is conducted in a central supply system or individual wet cleaning equipment.

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Chemical Concentration Monitor

SemiChem APM Series

Measures up to four components, including H2O2, H2SO4, and HF ppm concentrations in the sample.
Utilizes the titration method and shows excellent accuracy and reproducibility.
Standard monitoring is possible, and it can be measured in all on/off-line environments.

Nu Series

Measures H2O2, H2SO4, and HF at a concentration of 150/300 ppm in DHF and DBS chemicals, using UV/IR Optical Absorption Spectroscopy

Join ATIK, who strives for various innovations for the customers.

Join ATIK, who strives for various innovations for the customers.

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