ATIK's unique solution based on a professional analysis system,
which is the foundation for process improvement and high yield.
ATIK's process monitoring products are applied to major semiconductor processes such as photolithography, etching, deposition & ion implantation, and CMP process.
Chemical Concentration Monitor
Real-time monitoring of the concentration of various chemicals used in the cleaning process.
CMP slurry analysis and real-time monitoring of large particles.
Analyzing gas inside the chambers of the visual and deposition processes and utilizing with EPD.