Semiconductor
ATIK's unique solution based on a professional analysis system,
which is the foundation for process improvement and high yield.
ATIK's process monitoring products are applied to major semiconductor processes such as photolithography, etching, deposition & ion implantation, and CMP process.
![Chemical Concentration Monitor](/views/res/imgs/page/solutions/semiconductor-img-02.jpg)
Chemical Concentration Monitor
Real-time monitoring of the concentration of various chemicals used in the cleaning process.
![LPC](/views/res/imgs/page/solutions/semiconductor-img-03.jpg)
LPC
CMP slurry analysis and real-time monitoring of large particles.
![Mass spectroscopy](/views/res/imgs/page/solutions/semiconductor-img-04.jpg)
Mass spectroscopy
Analyzing gas inside the chambers of the visual and deposition processes and utilizing with EPD.